Features
- High-accuracy IPA temperature regulation using deionized water as a thermal refrigerant
- Maximum of 12 channels handling availability enables more compatibility
- Safety ensured: explosion proof construction and high capacity drain pan
- Efficient and economical inverter controlled operation
Specifications
*Please see the table by scrolling horizontally.
| RCTU-6 | RCTU-12 | ||||||
|---|---|---|---|---|---|---|---|
| Handling liquid | IPA | ||||||
| Temperature regulation range | 40-70℃ | ||||||
| Temperature regulation accuracy | ±0.5℃ (at the unit outlet) | ||||||
| Chemical liquid line channels | 6channels (Max.) | 12channels (Max.) | |||||
| Chemical liquid line flow rate | 0L/min (Min.) to 0.3L/min (Max.) per channel | ||||||
| Pressure loss | 0.03MPa or less | ||||||
| Heater capacity | Time to reach the set temperature: 60 min or less | ||||||
| Chemical liquid line piping materials | PFA, PTFA | ||||||
| Outside dimensions (mm) | 1090 (W) × 1326 (D) × 1898 (H) | 1110 (W) × 1650 (D) × 1811 (H) | |||||
| Weight | 600kg | 700kg | |||||
*Please see the table by scrolling horizontally.
Applications
- Semiconductor wafer cleaning process equipments
- LCD glass substrate cleaning process equipments