Features
- Uniquely designed load port with lowered height
- Reduces overall footprint of the installing equipments
- ISO class 1 cleanliness achieved
Specifications
*Please see the table by scrolling horizontally.
| Short Type Load Port | ||||||||
|---|---|---|---|---|---|---|---|---|
| Supported carrier | 300mm / 25capacity FOUP (SEMI E47.1compliant) | |||||||
| Compatible wafer | 300mm Si wafer | |||||||
| Operation time | Load/Unload: 8±1sec (without mapping) | |||||||
| Load/Unload:14±1sec (with mapping) | ||||||||
| Power supply | DC24V | |||||||
| Outside dimension (mm) | 470 (W) × 590 (D) × 910 (H) | |||||||
| Weight | 50kg | |||||||
*Please see the table by scrolling horizontally.
Applications
- Wafer loading/unloading interfaces for semiconductor wafer production equipments