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Desk Top Type SCRD4 (For 4 inch wafer)

Desk Top Type SCRD4 (For 4 inch wafer)

*Please see the table by scrolling horizontally.

Fluid CO2
Pressure 14MPa
Temperature 40℃
Chamber (ID) φ110×26mm
Safety function
  • Electrical safety mechanism
  • Mechanical safety mechanism
  • Abnormal overheat preventive mechanism
Control panel Driving program set by a touch screen
Dimension (W) 600× (D) 450× (H) 400mm (including handle)
Weight Approx. 60kg
Power supply AC100V 50/60Hz 10A

*Please see the table by scrolling horizontally.

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