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Industrial Transfer Robots (Semiconductor Production Equipment)

Our cutting-edge transfer robots are to satisfy the semiconductor manufacturers demands of higher throughput, higher reliability and smaller footprint.

Main Products of This Field

Wafer Handling Robot Heat resistant to 350℃ or more High vacuum environment clean robot

Wafer Handling Robot

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FOUP Buffer (FOUP Handling Robot)

FOUP Buffer (FOUP Handling Robot)

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Short Type Load Port

Short Type Load Port

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