Features
- High-performance carbon heater achieves lower energy consumption thanks to its superior thermal efficiency
- Long-lasting stability of the resistance value lengthens the life cycle of a heater.
- Available particle contamination removal filter as an option
Specifications
*Please see the table by scrolling horizontally.
| RHDIW150A | |||||||
|---|---|---|---|---|---|---|---|
| Handling liquid | Ultrapure water | ||||||
| Temperature regulation range | 25-85℃ | ||||||
| Temperature regulation accuracy | ±1.0℃ | ||||||
| Temperature regulation capacity | 38 L/min (Standard specification) | ||||||
| Pressure loss | 0.027MPa or less | ||||||
| Heater capacity | 147kW (Infrared carbon fiber heater) | ||||||
| DIW line piping materials | Quartz, fluoropolymer resin | ||||||
| Power supply | 3-phase, AC220–480V ±10% | ||||||
| Outside dimensions (mm) | 1010 (W) × 1260 (D) × 2120 (H) | ||||||
| Weight | 520kg | ||||||
*Please see the table by scrolling horizontally.
Applications
- Semiconductor wafer cleaning process
- LCD glass substrate cleaning process equipments
- Heat and dilution application in solvent handling equipments etc.