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Ultrapure Water Heating Unit

Features

  1. High-performance carbon heater achieves lower energy consumption thanks to its superior thermal efficiency
  2. Long-lasting stability of the resistance value lengthens the life cycle of a heater.
  3. Available particle contamination removal filter as an option

Ultrapure Water Heating Unit

Specifications

*Please see the table by scrolling horizontally.

RHDIW150A
Handling liquid Ultrapure water
Temperature regulation range 25-85℃
Temperature regulation accuracy ±1.0℃
Temperature regulation capacity 38 L/min (Standard specification)
Pressure loss 0.027MPa or less
Heater capacity 147kW (Infrared carbon fiber heater)
DIW line piping materials Quartz, fluoropolymer resin
Power supply 3-phase, AC220–480V ±10%
Outside dimensions (mm) 1010 (W) × 1260 (D) × 2120 (H)
Weight 520kg

*Please see the table by scrolling horizontally.

Applications

  • Semiconductor wafer cleaning process
  • LCD glass substrate cleaning process equipments
  • Heat and dilution application in solvent handling equipments etc.

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