Features
- Expanded temperature regulation capability: from -50℃ to +150℃
- High flow rate of 30L/min achieved
- ±1.0℃ high-accuracy temperature regulation
- Efficient and economical inverter controlled operation
Specifications
*Please see the table by scrolling horizontally.
| RCU-20WL | |||||||
|---|---|---|---|---|---|---|---|
| Refrigerating capacity | 2KW | ||||||
| Heating capacity | 2KW | ||||||
| Temperature regulation accuracy | ±1.0℃ | ||||||
| Refrigerating system | Cascade refrigerating system | ||||||
| Power supply | 3-phase 50/60 Hz, AC 200–240 V | ||||||
| Outside dimensions (mm) | 1100 (W) × 1300 (D) × 1990 (H) | ||||||
| Weight | 860kg | ||||||
| Refrigerant fluid | R-404A | ||||||
| Temperature regulation object fluid | Brine temperature control | ||||||
| Conformed standards | SEMI S2 | ||||||
*Please see the table by scrolling horizontally.
Applications
- Heat source devices for semiconductor wafer production equipments
- Heat source devices for LCD manufacturing equipments
- Laser related equipments
- Medical equipments (CT, MRI) etc.