Features
- A unique fusion of three different functions:
air dryer, fluid chiller and air conditioning unit - Greatly reduced overall footprint and installation time
- Efficient and economical inverter controlled operation
Specifications
*Please see the table by scrolling horizontally.
| RTC-3A | |||||||
|---|---|---|---|---|---|---|---|
| Fluid chiller unit | Refrigerating capacity | 550W | |||||
| Pump rating | 1.1kw (50/60Hz) | ||||||
| Air dryer unit | Refrigerating capacity | 600W | |||||
| Heater capacity | 400W | ||||||
| Temperature regulation accuracy | ±0.1℃ | ||||||
| Temperature regulation capacity | 500L/min | ||||||
| Air conditioning unit | Refrigerating capacity | 1400W | |||||
| Blower rating | 1kw | ||||||
| Heater capacity | 3.5kw | ||||||
| Power supply | 3-phase 50/60 Hz, AC200V | ||||||
| Outside dimensions (mm) | 810 (W) × 820 (D) × 1750 (H) | ||||||
| Weight | 400kg | ||||||
| Refrigerant fluid | R-134a | ||||||
*Please see the table by scrolling horizontally.
Applications
- Heat source devices for semiconductor wafer production equipments
- Heat source devices for semiconductor photolithography equipments etc.