FOUP Buffer (FOUP Handling Robot)

Features

  1. FOUP feeding time is shortened significantly by utilizing its unique two-robot-arms configuration
  2. Capable of stocking more than twenty FOUPs at once
  3. Z-axis foldable construction satisfies various height limitation at the time of transportation

FOUP Buffer (FOUP Handling Robot)

Specifications

*Please see the table by scrolling horizontally.

FOUP Buffer (FOUP Handling Robot)
FOUP feeding performance Maximum velocity: 933mm/s (Z-axis/Y-axis) 81deg/s (Arm axis)
Chuck clamp Maximum stroke: 25mm (at one side)
Safety interlock Arm sensor(Collision prevention and feed position detection),
FOUP detection sensor, etc.
Required fluid Clean dry air
Required fluid flow rate 5L/min
Power supply 3-phase 50/60 Hz, AC200–230V
Outside dimension (mm) 2360 (W) × 960 (D) × 2820 (H) [2600 (H) when folded]
Weight Main unit: 500kg Control box: 27kg

*Please see the table by scrolling horizontally.

Applications

  • Automated FOUP stocking/trasnferring for semiconductor wafer production equipments

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